Indima ebalulekileyo ye-Tungsten Filament kwi-Semiconductor Manufacturing: Ukuchaneka kunye nokuthembeka.
Umzi-mveliso we-semiconductor, umqolo we-electronics yanamhlanje, ulandela ngokuqhubekayo izinto ezinokumelana neemeko ezigqithisileyo kwaye wenze ukuchaneka kwe-microscopic. Phakathi kwezi, i-tungsten kunye neefom zayo ezikhethekileyo, ezifana ne-tungsten filament kunye ne-tungsten exhasayo inxalenye, ziye zavela njengamacandelo ayimfuneko kwiinkqubo eziphambili zokuvelisa.
Kutheni iTungsten?
I-Tungsten inomdibaniso okhethekileyo weepropathi ezenza ukuba ilungele imekobume enzima yokwenziwa kwe-semiconductor. Ngeyona ndawo iphezulu yokunyibilika kuzo zonke iintsimbi (3,422 degree), ukomelela okuphezulu okuphezulu{3}}kweqondo lobushushu, kunye nokumelana okumangalisayo nokurhubuluza kunye nokhukuliseko, amacandelo e-tungsten agcina imfezeko yolwakhiwo apho ezinye izixhobo zinokusilela. Oku kuthembeka kubalulekile
I-Tungsten inomdibaniso okhethekileyo weepropathi ezenza ukuba ilungele imekobume enzima yokwenziwa kwe-semiconductor. Ngeyona ndawo iphezulu yokunyibilika kuzo zonke iintsimbi (3,422 degree), ukomelela okuphezulu okuphezulu{3}}kweqondo lobushushu, kunye nokumelana okumangalisayo nokurhubuluza kunye nokhukuliseko, amacandelo e-tungsten agcina imfezeko yolwakhiwo apho ezinye izixhobo zinokusilela. Oku kuthembeka kubalulekile
ukuqinisekisa imveliso engaguqukiyo kunye nokusebenza kwesixhobo.
Izicelo eziphambili: I-Tungsten Filament kunye neCandelo leNkxaso
Esinye sezicelo ezibaluleke kakhulu yi-tungsten filament. Kwiinkqubo ezifana ne-Physical Vapor Deposition (PVD) kunye ne-chemical vapor deposition (CVD), i-tungsten filament ifudunyezwa ukuya kumaqondo obushushu aphezulu kakhulu ukuba abe ngumphunga okanye ukubola kweegesi zangaphambili. Oku kuvumela ukubekwa okuchanekileyo kweefilimu ezibhityileyo kwii-silicone wafers. Ukuzinza kunye nokucoceka kwe-tungsten filament kubaluleke kakhulu, njengoko nayiphi na inguqu okanye ukungcola kunokuchaphazela ngokuthe ngqo ukufana kunye neempawu zombane zefilimu egciniweyo.
Ngaphandle kwee-filaments, iindawo ezixhasayo ze-tungsten zikho yonke indawo ngaphakathi kwezixhobo zokulungisa i-semiconductor. Ezi ziquka iikhoyili zesifudumezi, izikhuselo zemitha, izixhobo zokuvalela, kunye nezinto ezahlukeneyo ngaphakathi{1}}kwiziko lobushushu obuphezulu kunye negumbi lokutshiza. Ezi nxalenye ezixhasayo ze-tungsten kufuneka zibonelele ngenkxaso engagungqiyo yomatshini kunye nokuzinza kwe-thermal ngelixa kuncitshiswa ukuveliswa kwamasuntswana, eyona nto ibangela iziphene ze-wafer.
Ukuqukumbela
Njengoko ishishini lesemiconductor liqhubela phambili lisiya kwiindawo ezincinci kunye nolwakhiwo oluntsonkothileyo lwe-3D, indima yemathiriyeli ephezulu{1}yokusebenza iba baluleke ngakumbi. Intambo ye-tungsten yokubekwa okuchanekileyo kunye neenxalenye ezahlukeneyo ze-tungsten ezixhasayo ngaphakathi kwamagumbi enkqubo zibalulekile ekufezekiseni amanqanaba afunekayo okusebenza kunye ne-miniaturization.
